Characterization of CuInTe2 thin films prepared by pulsed laser deposition

被引:13
作者
Gremenok, VF
Victorov, IA
Bodnar, IV
Hill, AE
Pilkington, RD
Tomlinson, RD
Yakushev, MV
机构
[1] Byelarussian Acad Sci, Inst Phys Solids & Semicond, Minsk 220072, BELARUS
[2] Univ Salford, Dept Elect & Elect Engn, Salford M5 4WT, Lancs, England
关键词
pulsed laser deposition; thin films; films composition; target;
D O I
10.1016/S0167-577X(97)00236-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper initial results are presented for the growth and characterization of CuInTe2 thin films prepared by pulsed loser deposition (PLD) using Nd:YAG laser and XeCl excimer laser. The films were analyzed using X-ray diffraction XRD), energy dispersive X-ray analysis (EDAX) and Rutherford back scattering (RBS) measurements. The composition of the target material was largely maintained in the films. This suggests that PLD could be used as a technique for the fabrication of ternary semiconductor films. Electrical measurements indicated p-type conductivity with surface resistivity values in the range of 10(-1)-10(-2) Omega cm. The films had a high optical absorption of about 104 cm(-1) and a band gap of 0.96 eV. (C) 1998 Elsevier Science B.V.
引用
收藏
页码:130 / 134
页数:5
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