Direct organometallic synthesis: The metal-etching reactions of isobutyl iodide on Al(111)

被引:7
作者
Lohokare, SP
Crane, EL
Dubois, LH
Nuzzo, RG [1 ]
机构
[1] Univ Illinois, Sch Chem Sci, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Sch Chem Sci, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA
[3] Def Adv Res Projects Agcy, Arlington, VA 22203 USA
[4] MIT, Lincoln Lab, Lexington, MA 02173 USA
关键词
D O I
10.1021/la970716g
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We report a study of the thermal decomposition and reactions of isobutyl iodide on Al(111). Using temperature-programmed reaction and Auger electron spectroscopies, it was found that more than one product-forming pathway involving the alkyl moiety exists on this surface. A first-order, beta-hydride elimination reaction converts surface-bound isobutyl groups derived from the dissociation of the C-I bond to gas phase isobutene and dihydrogen at temperatures above similar to 420 K. Competing with this unimolecular process is a collection of complex associative reactions which effect the etching of the aluminum surface via the formation of volatile organometallic species. This includes formation and subsequent desorption of diisobutylaluminum iodide (desorption peak maximum at similar to 490 K), diisobutylaluminum hydride (similar to 515 K), methylaluminum dihydride (similar to 725 K), and AlIx, x = 1-3 (similar to 620 K). The kinetics of the processes yielding the various aluminum hydrides are coupled to that of the beta-hydride elimination pathway (which serves as the hydrogen atom source) and are strongly coverage dependent. The formation of MeAlH2 reveals the occurrence of a kinetically competitive beta-methyl elimination reaction of the surface alkyl groups.
引用
收藏
页码:1328 / 1336
页数:9
相关论文
共 41 条
[31]  
ROONEY JJ, 1985, J MOL CATAL, V31, P147
[32]  
SIMMONDS MG, 1995, CVD METALS, P45
[33]  
Sze S.M., 1985, SEMICONDUCTOR DEVICE
[34]   DETERMINATION OF THE ACTIVATION-ENERGY FOR THE DISSOCIATION OF THE CARBON IODINE BOND IN METHYL-IODIDE ADSORBED ON NI(100) SURFACES [J].
TJANDRA, S ;
ZAERA, F .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1992, 10 (02) :404-405
[35]  
WALTENBURG HN, 1995, CHEM REV, V95, P1589
[36]   DESORPTION-KINETICS OF H-2 FROM AL(100), AL(110) AND AL(111) [J].
WINKLER, A ;
POZGAINER, G ;
RENDULIC, KD .
SURFACE SCIENCE, 1991, 251 :886-890
[37]   FUNDAMENTALS OF 2-STEP ETCHING TECHNIQUES FOR IDEAL SILICON-HYDROGEN TERMINATION OF SILICON(111) [J].
YANG, SK ;
PETER, S ;
TAKOUDIS, CG .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (07) :4107-4112
[38]   PREPARATION AND REACTIVITY OF ALKYL-GROUPS ADSORBED ON METAL-SURFACES [J].
ZAERA, F .
ACCOUNTS OF CHEMICAL RESEARCH, 1992, 25 (06) :260-265
[39]   THERMAL-STABILITY OF ALKYL-GROUPS ON ALUMINUM [J].
ZEGARSKI, BR ;
DUBOIS, LH .
SURFACE SCIENCE, 1992, 262 (03) :L129-L133
[40]   ALKYL HALIDE PHOTOCHEMISTRY ON AG(111) .3. METHYL-IODIDE [J].
ZHOU, XL ;
WHITE, JM .
SURFACE SCIENCE, 1991, 241 (03) :270-278