Wrinkle-Based Measurement of Elastic Modulus of Nano-Scale Thin Pt Film Deposited on Polymeric Substrate: Verification and Uncertainty Analysis

被引：20

作者：

Choi, H-J. ^{[1
]}

Kim, J-H. ^{[1
]}

Lee, H-J. ^{[1
]}

Song, S-A. ^{[1
]}

Lee, H-J. ^{[1
]}

Han, J-H. ^{[2
]}

Moon, M-W. ^{[2
]}

机构：

[1] Korea Inst Machinery & Mat, Taejon 305343, South Korea

[2] Korea Inst Sci & Technol, Seoul 136791, South Korea

来源：

EXPERIMENTAL MECHANICS | 2010年 / 50卷 / 05期

关键词：

Nano-scale thin film; Pt; Wrinkle; Elastic modulus; Tensile test; MECHANICAL-PROPERTIES;

D O I：

10.1007/s11340-009-9243-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Wrinkle-based measurement of elastic modulus for a nano-scale thin film was analyzed. As a demonstrative example, the wrinkles of Pt films on a Polydimethylsiloxane (PDMS) substrate under compressive loading were formed with a well-defined wavelength, corresponding to the difference of elastic moduli between the films and substrates. The elastic modulus of the Pt nano-scale thin film measured with the wrinkle-based measurement was found to be consistent with that independently measured with micro-tensile test. Uncertainty of the wrinkle-based measurement was analyzed to figure out the main uncertainty components for the evaluation of elastic modulus measurement, and guidelines for the reliable wrinkle-based measurement were suggested.

引用

页码：635 / 641

页数：7

共 22 条

[1]

ABRIL OD, 2008, NANOTECHNOLOGY, V19

[2] Herringbone buckling patterns of compressed thin films on compliant substrates [J].

Chen, X ;

Hutchinson, JW .

JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME, 2004, 71 (05) :597-603

[3]

Doebelin, 1990, MEASUREMENT SYSTEMS

[4] A methodology for determining mechanical properties of freestanding thin films and MEMS materials [J].

Espinosa, HD ;

Prorok, BC ;

Fischer, M .

JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 2003, 51 (01) :47-67

[5] Capillary wrinkling of floating thin polymer films [J].

Huang, Jiangshui ;

Juszkiewicz, Megan ;

de Jeu, Wim H. ;

Cerda, Enrique ;

Emrick, Todd ;

Menon, Narayanan ;

Russell, Thomas P. .

SCIENCE, 2007, 317 (5838) :650-653

[6] Kinetic wrinkling of an elastic film on a viscoelastic substrate [J].

Huang, R .

JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 2005, 53 (01) :63-89

[7] Nonlinear analyses of wrinkles in a film bonded to a compliant substrate [J].

Huang, ZY ;

Hong, W ;

Suo, Z .

JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 2005, 53 (09) :2101-2118

[8] Molecular scale buckling mechanics on individual aligned single-wall carbon nanotubes on elastomeric substrates [J].

Khang, Dahl-Young ;

Xiao, Jianliang ;

Kocabas, Coskun ;

MacLaren, Scott ;

Banks, Tony ;

Jiang, Hanqing ;

Huang, Yonggang Y. ;

Rogers, John A. .

NANO LETTERS, 2008, 8 (01) :124-130

[9] Deflection of wafers and cantilevers with Pt/LNO/PZT/LNO/Pt/Ti/SiO2 multilayered structure [J].

Kobayashi, Takeshi ;

Ichiki, Masaaki ;

Noguchi, Toshihiko ;

Maeda, Ryutaro .

THIN SOLID FILMS, 2008, 516 (16) :5272-5276

[10] Young's modulus and tensile strength of CuNi(Mn) thin films on polyimide foils by tensile testing [J].

Macionczyk, F ;

Bruckner, W ;

Pitschte, W ;

Reiss, G .

JOURNAL OF MATERIALS RESEARCH, 1998, 13 (10) :2852-2858

← 1 2 3 →