Young's modulus and tensile strength of CuNi(Mn) thin films on polyimide foils by tensile testing

被引:22
作者
Macionczyk, F [1 ]
Bruckner, W [1 ]
Pitschte, W [1 ]
Reiss, G [1 ]
机构
[1] Inst Solid State & Mat Res Dresden, D-01171 Dresden, Germany
关键词
D O I
10.1557/JMR.1998.0390
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Force-strain curves were measured for 1.0 mu m and 1.5 mu m thick Cu0.57Ni0.42Mn0.01 films on 8 mu m thick polyimide foils by tensile testing. By separating the force working on the polyimide foil from that working on the metal-polyimide compound, stress-strain curves for the CuNi(Mn) films were obtained. Young's modulus and tensile strength were determined for as-deposited and annealed [350 degrees C, 1 h, N-2/H-2 (5 vol %) atmosphere] films by this method. Crack propagation starts at the end of the elastic region at 0.2 to 0.7% strain, depending on the film thickness and the thermal treatment. The cracking behavior is described by a steady-state approximation.
引用
收藏
页码:2852 / 2858
页数:7
相关论文
共 22 条
[1]  
BERLICKI TH, 1996, VIDE SCI TECH APPL S, V279, P221
[2]   CRACKING OF THIN BONDED FILMS IN RESIDUAL TENSION [J].
BEUTH, JL .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 1992, 29 (13) :1657-1675
[3]   RESISTANCE BEHAVIOR AND INTERDIFFUSION OF LAYERED CUNI-NICR FILMS [J].
BRUCKNER, W ;
SCHUMANN, J ;
BAUNACK, S ;
PITSCHKE, W ;
KNUTH, T .
THIN SOLID FILMS, 1995, 258 (1-2) :236-246
[4]   BIAXIAL MODULUS AND COEFFICIENT OF THERMAL-EXPANSION OF CU0.57NI0.42MN0.01 (CONSTANTAN) FILMS [J].
BRUCKNER, W .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1995, 148 (02) :K89-K91
[5]   Adjustment of temperature coefficient of resistance in NiCr/CuNi(Mn)/NiCr films [J].
Bruckner, W ;
Baunack, S ;
Elefant, D ;
Reiss, G .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (11) :8516-8520
[6]   Degradation of NiCr/CuNiMn/NiCr films on alumina substrates [J].
Bruckner, W ;
Edelmann, J ;
Vinzelberg, H ;
Reiss, G ;
Knuth, T .
THIN SOLID FILMS, 1996, 280 (1-2) :227-232
[7]  
Bruckner W, 1997, MATER RES SOC SYMP P, V436, P47
[8]  
BRUCKNER W, UNPUB
[9]  
FAUPEL F, 1989, J APPL PHYS, V65, P1917
[10]  
Griffith A.A., 1921, PHILOS T R SOC A, V221, P163, DOI DOI 10.1098/RSTA.1921.0006