Structural properties and bandgap bowing of ZnO1-xSx thin films deposited by reactive sputtering

被引：236

作者：

Meyer, BK ^{[1
]}

Polity, A ^{[1
]}

Farangis, B ^{[1
]}

He, Y ^{[1
]}

Hasselkamp, D ^{[1
]}

Krämer, T ^{[1
]}

Wang, C ^{[1
]}

机构：

[1] Univ Giessen, Inst Phys 1, D-35392 Giessen, Germany

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 21期

关键词：

D O I：

10.1063/1.1825053

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A series of ZnO1-xSx films with 0less than or equal toxless than or equal to1.0 was deposited by radio-frequency reactive sputtering on different substrates. The structural characterization by x-ray diffraction measurements revealed that the films have wurtzite symmetry and correlated investigations of the layer composition by photoelectron spectroscopy showed that the lattice constant varies linearly with x. The composition dependence of the band gap energy in the ternary system was determined by optical transmission and the optical bowing parameter was found to be about 3 eV. (C) 2004 American Institute Of Physics.

引用

页码：4929 / 4931

页数：3

共 11 条

[1]

Iwata K, 2002, PHYS STATUS SOLIDI B, V229, P887, DOI 10.1002/1521-3951(200201)229:2<887::AID-PSSB887>3.0.CO

[2]

2-G

[3] Band gap engineering based on MgxZn1-xO and CdyZn1-yO ternary alloy films [J].