One-step formation of aligned carbon nanotube field emitters at 400°C

被引：59

作者：

Shiratori, Y

Hiraoka, H

Takeuchi, Y

Itoh, S

Yamamoto, M

机构：

[1] Int Ctr Mat Res, Kawasaki Ku, Kanagawa 2100855, Japan

[2] Futaba Corp, Chiba 2994395, Japan

[3] Ritsumeikan Univ, Coll Sci & Engn, Shiga 5258577, Japan

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 15期

关键词：

D O I：

10.1063/1.1566803

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Fabrication of field emitters by the radio-frequency plasma-enhanced chemical vapor deposition of vertically aligned carbon nanotubes (CNT) on soda-lime glass is reported. CNT was produced at 400 degreesC by the control of the collision energy of carbonic cations to a substrate through a dc bias voltage. The CNTs produced in this work were of a cup-stacked type and had catalyst particles on the top. The CNT emitters formed by our method were integrated into triode-type microcathodes and showed field-emission properties suitable for display applications. (C) 2003 American Institute of Physics.

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页码：2485 / 2487

页数：3

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