One-step formation of aligned carbon nanotube field emitters at 400°C

被引:59
作者
Shiratori, Y
Hiraoka, H
Takeuchi, Y
Itoh, S
Yamamoto, M
机构
[1] Int Ctr Mat Res, Kawasaki Ku, Kanagawa 2100855, Japan
[2] Futaba Corp, Chiba 2994395, Japan
[3] Ritsumeikan Univ, Coll Sci & Engn, Shiga 5258577, Japan
关键词
D O I
10.1063/1.1566803
中图分类号
O59 [应用物理学];
学科分类号
摘要
Fabrication of field emitters by the radio-frequency plasma-enhanced chemical vapor deposition of vertically aligned carbon nanotubes (CNT) on soda-lime glass is reported. CNT was produced at 400 degreesC by the control of the collision energy of carbonic cations to a substrate through a dc bias voltage. The CNTs produced in this work were of a cup-stacked type and had catalyst particles on the top. The CNT emitters formed by our method were integrated into triode-type microcathodes and showed field-emission properties suitable for display applications. (C) 2003 American Institute of Physics.
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页码:2485 / 2487
页数:3
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