Hydrogen distribution, nanostructures and optical properties of high deposition rate hot-wire CVD a-Si:H

被引：2

作者：

Baugh, J ^{[1
]}

Wang, K ^{[1
]}

Han, DX ^{[1
]}

Wu, Y ^{[1
]}

机构：

[1] Univ N Carolina, Dept Phys & Astron, Chapel Hill, NC 27599 USA

来源：

THIN SOLID FILMS | 2003年 / 430卷 / 1-2期

关键词：

amorphous silicone; nanostructure; nuclear magnetic resonance; photoluminescence;

D O I：

10.1016/S0040-6090(03)00080-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nuclear magnetic resonance shows that under certain growth conditions hot-wire CVD a-Si:H grown at high rates contains a large amount of nanovoids. It was found that such nanovoids are filled with H-2 gas and the nanovoids are elongated with the along axis in the growth direction. Measured on the same samples photoluminescence (PL) showed that the tail-to-tail PL peak at 80 K was red-shifted significantly from 1.36 to 1.05 eV when the growth rate increases from 10 to 55 Angstrom/s. These studies indicate that the nanostructure is important to the behavior of PL in a-Si:H. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：95 / 99

页数：5

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