A reflection-mode apertureless scanning near-field optical microscope developed from a commercial scanning probe microscope

被引:54
作者
Wurtz, G [1 ]
Bachelot, R [1 ]
Royer, P [1 ]
机构
[1] Univ Technol Troyes, Lab Nanotechnol & Instrumentat Opt, F-10010 Troyes, France
关键词
D O I
10.1063/1.1148834
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We have developed a polyvalent reflection-mode apertureless scanning near-field optical microscope (SNOM) from a commercial scanning probe microscope (SPM). After having explained our motivations, we describe the instrument precisely, by specifying how we have integrated optical elements to the initial SPM, by taking advantage of its characteristics, and without modifying its initial functions. The instrument allows five different reflection-mode SNOM configurations and enables polarization studies. Three types of SNOM probes can be used: dielectric, semiconducting, and metallic probes. The latter an homemade probes whose successful use, as probes for atomic force microscopy, by the commercial SPM has been experimentally demonstrated. Using silicon-nitride (dielectric) probes, one of the five configurations has been experimentally tested with two samples. The first sample is made of nanometric aluminum dots on a glass substrate and the second sample is the output front facet of a laser diode. The preliminary SNOM images of the latter reveal pure optical contrasts. (C) 1998 American Institute of Physics. [S0034-6748(98)03404-2].
引用
收藏
页码:1735 / 1743
页数:9
相关论文
共 43 条
[41]   NEAR-FIELD OPTICAL MICROSCOPE USING A SILICON-NITRIDE PROBE [J].
VANHULST, NF ;
MOERS, MHP ;
NOORDMAN, OFJ ;
TACK, RG ;
SEGERINK, FB ;
BOLGER, B .
APPLIED PHYSICS LETTERS, 1993, 62 (05) :461-463
[42]  
Wickramasinghe H., 1990, US Patent, Patent No. [4,947,034, 4947034]
[43]   SCANNING INTERFEROMETRIC APERTURELESS MICROSCOPY - OPTICAL IMAGING AT 10 ANGSTROM RESOLUTION [J].
ZENHAUSERN, F ;
MARTIN, Y ;
WICKRAMASINGHE, HK .
SCIENCE, 1995, 269 (5227) :1083-1085