Ultrasonic flexural Lamb-wave actuators based on PZT thin film

被引：23

作者：

Luginbuhl, P

Collins, SD

Racine, GA

Gretillat, MA

de Rooij, NF

Brooks, KG

Setter, N

机构：

[1] Univ Neuchatel, Inst Microtechnol, CH-2007 Neuchatel, Switzerland

[2] Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Lab Ceram MXD, Ecublens, CH-1015 Lausanne, Switzerland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 64卷 / 01期

关键词：

flexural plate waves; Lamb waves; lead zirconate titanate; ultrasonic actuators;

D O I：

10.1016/S0924-4247(98)80056-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems are presented. Ultrasonic flexural plate waves (FPWs) at frequencies of the order of megahertz are generated and detected in a thin acoustic composite membrane by using two interdigitated transducers (IDTs) patterned on a 0.75 mu m thick piezoelectric ceramic PZT film, which provides high acoustic power for physical translation of fluid and microparticles. (C) 1998 Elsevier Science S.A.

引用

页码：41 / 49

页数：9

共 9 条

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BROKS K, 1995, INTEGR FERROELECTR, V8, P13

[2]

Dabirikhah H., 1992, P IEEE 1992 ULTR S I, P313, DOI [10.1109/ULTSYM.1992.275989, DOI 10.1109/ULTSYM.1992.275989]

[3] Interferometric study of piezoelectric degradation in ferroelectric thin films [J].