Atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy

被引：171

作者：

D'Alfonso, A. J. ^{[1
]}

Freitag, B. ^{[2
]}

Klenov, D. ^{[2
]}

Allen, L. J. ^{[1
]}

机构：

[1] Univ Melbourne, Sch Phys, Melbourne, Vic 3010, Australia

[2] FEI Co, Eindhoven, Netherlands

来源：

PHYSICAL REVIEW B | 2010年 / 81卷 / 10期

基金：

澳大利亚研究理事会;

关键词：

TRANSMISSION ELECTRON-MICROSCOPE; STEM; EELS;

D O I：

10.1103/PhysRevB.81.100101

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We demonstrate atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy in scanning transmission electron microscopy. Theoretical simulations of the imaging process demonstrate that these images are directly interpretable. This is due to the fact that the effective ionization interaction is local and this is an incoherent mode of imaging.

引用

页数：4

共 23 条

[11] Decisive factors for realizing atomic-column resolution using STEM and EELS [J].

Kimoto, Koji ;

Ishizuka, Kazuo ;

Matsui, Yoshio .

MICRON, 2008, 39 (03) :257-262

[12] Element-selective imaging of atomic columns in a crystal using STEM and EELS [J].

Kimoto, Koji ;

Asaka, Toru ;

Nagai, Takuro ;

Saito, Mitsuhiro ;

Matsui, Yoshio ;

Ishizuka, Kazuo .

NATURE, 2007, 450 (7170) :702-704

[13]

Kirkland E., 1998, Advanced computing in Electron Microscopy

[14] THERMAL VIBRATIONS IN CONVERGENT-BEAM ELECTRON-DIFFRACTION [J].

LOANE, RF ;

XU, PR ;

SILCOX, J .

ACTA CRYSTALLOGRAPHICA SECTION A, 1991, 47 :267-278

[15] INCOHERENT IMAGING OF ZONE AXIS CRYSTALS WITH ADF STEM [J].

LOANE, RF ;

XU, P ;

SILCOX, J .

ULTRAMICROSCOPY, 1992, 40 (02) :121-138

[16] Atomic-scale chemical imaging of composition and bonding by aberration-corrected microscopy [J].

Muller, D. A. ;

Kourkoutis, L. Fitting ;

Murfitt, M. ;

Song, J. H. ;

Hwang, H. Y. ;

Silcox, J. ;

Dellby, N. ;

Krivanek, O. L. .

SCIENCE, 2008, 319 (5866) :1073-1076

[17] MAPPING SP(2) AND SP(3) STATES OF CARBON AT SUBNANOMETER SPATIAL-RESOLUTION [J].

MULLER, DA ;

TZOU, Y ;

RAJ, R ;

SILCOX, J .

NATURE, 1993, 366 (6457) :725-727

[18] Interpreting atomic-resolution spectroscopic images [J].

Oxley, M. P. ;

Varela, M. ;

Pennycook, T. J. ;

van Benthem, K. ;

Findlay, S. D. ;

D'Alfonso, A. J. ;

Allen, L. J. ;

Pennycook, S. J. .

PHYSICAL REVIEW B, 2007, 76 (06)

[19] Spectroscopic imaging of single atoms within a bulk solid [J].

Varela, M ;

Findlay, SD ;

Lupini, AR ;

Christen, HM ;

Borisevich, AY ;

Dellby, N ;

Krivanek, OL ;

Nellist, PD ;

Oxley, MP ;

Allen, LJ ;

Pennycook, SJ .

PHYSICAL REVIEW LETTERS, 2004, 92 (09) :095502-1

[20] An integrated Silicon Drift Detector System for FEI Schottky Field Emission Transmission Electron Microscopes [J].

von Harrach, H. S. ;

Dona, P. ;

Freitag, B. ;

Soltau, H. ;

Niculae, A. ;

Rohde, M. .

MICROSCOPY AND MICROANALYSIS, 2009, 15 :208-209

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