Experimental measurement and model analysis of damping effect in nanoscale mechanical beam resonators in air

被引：82

作者：

Yum, K ^{[1
]}

Wang, ZY ^{[1
]}

Suryavanshi, AP ^{[1
]}

Yu, MF ^{[1
]}

机构：

[1] Univ Illinois, Dept Mech & Ind Engn, Urbana, IL 61801 USA

来源：

JOURNAL OF APPLIED PHYSICS | 2004年 / 96卷 / 07期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.1787912

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The damping effect in the nanoscale mechanical beam resonators operated under ambient conditions was studied. Experimental measurement of the viscous air damping in the nanowire cantilever resonators was carried out using the electric-field-induced resonance method; and a theoretical model, which accounts for the effects of dimension and material property of the nanowires and the air viscosity of the environment, was developed for describing the mechanical resonance and damping. The study showed that the damping effect in the nanoscale beam resonators operated in air could be as high as that in the microscale resonators operated in liquids, and scaled with the geometric dimension of the studied nanowire cantilevers. (C) 2004 American Institute of Physics.

引用

页码：3933 / 3938

页数：6

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