Diffractive optics fabrication system for large aspheric surface testing

被引:17
作者
Rhee, Hyug-Gyo [1 ]
Song, Jae-Bong
Kim, Dong-Ik
Lee, Yun-Woo
Ha, Kwan-Soo
机构
[1] Korea Res Inst Stand & Sci, Space Opt Res Ctr, Taejon 305340, South Korea
[2] Hannan Univ, Dept Appl Opt & Electromagnet, Taejon 306791, South Korea
关键词
Null testing; computer-generated hologram; fabrication; auto-focusing;
D O I
10.3938/jkps.50.1032
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
A computer-generated hologram (CGH) is widely used for null testing of large aspheric surfaces. The problem is every single aspheric surface requires a different CGH. If various surfaces are to be tested, it is necessary to fabricate various CGHs in the laboratory. To address this, we have developed a cylindrical-type laser writing system, which can fabricate a maximum 300-mm-diameter CGH with about a 0.78-mu m spatial resolution in the radial direction. For focusing the writing beam on the material surface, we use the well-known auto-focusing technique with a couple of astigmatic lenses.
引用
收藏
页码:1032 / 1036
页数:5
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