Fabrication and characterization of spherical polycrystalline diamond emitter arrays

被引：7

作者：

Chen, CF ^{[1
]}

Huang, WH ^{[1
]}

机构：

[1] Natl Chiao Tung Univ, Inst Mat Sci & Engn, Hsinchu 30050, Taiwan

来源：

THIN SOLID FILMS | 1997年 / 308卷

关键词：

diamond; field emitter array; emission current; microwave plasma chemical vapor deposition;

D O I：

10.1016/S0040-6090(97)00671-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, a high density of spherical polycrystalline diamond field emitter arrays (SPD-FEAs) were fabricated, using microwave plasma chemical vapor deposition (MPCVD) method. Results obtained from the current-voltage (I-e-V-a) characteristics indicate that the impurities heavily influence electron emission. In addition, the emissions current of the phosphorus-doped SDP-FEAs appears to be 25 times lar er than the boron-doped and 120 times larger than the undoped SPD-FEAs. (C) 1997 Elsevier Science S.A.

引用

页码：85 / 89

页数：5

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