An experimental investigation of microresistor laser printing with gold nanoparticle-laden inks

被引:30
作者
Bieri, NR
Chung, J
Poulikakos, D [1 ]
Grigoropoulos, CP
机构
[1] ETH Zentrum, ETH Swiss Fed Inst Technol, Inst Energy Technol, Lab Thermodynam Emerging Technol, CH-8092 Zurich, Switzerland
[2] Korea Univ, Dept Mech Engn, Seoul 136701, South Korea
[3] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2005年 / 80卷 / 07期
关键词
D O I
10.1007/s00339-004-3195-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper presents an experimental investigation of the novel thermal manufacturing process of printing and laser curing of nanoparticle-laden inks that can produce functional microstructures such as electronic microresistors and interconnections for semiconductors and other devices. Of specific interest are the complex and interweaved transport phenomena involved, focusing on the absorption and diffusion processes of irradiated laser energy influencing solvent vaporization, the nanoparticle curing process, the substrate, and the final quality of the produced resistor. Parametric studies of the thermal process together with extensive microscopy analysis of the topography and resistivity measurements piece together a better understanding of the underlying physics and aid the development of the technology.
引用
收藏
页码:1485 / 1495
页数:11
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