Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1-xTix)N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining

被引：59

作者：

Jilek, M

Cselle, T

Holubar, P

Morstein, M

Veprek-Heijman, MGJ

Veprek, S

机构：

[1] Tech Univ Munich, Inst Inorgan Chem Mat, D-85747 Garching, Germany

[2] SHM Ltd, CZ-78803 Novy Malin 266, Czech Republic

[3] PLATIT AG, CH-2540 Grenchen, Switzerland

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 2004年 / 24卷 / 04期

关键词：

superhard nanocomposites; industrial applications; (AlTi)N/Si3N4; Al-Ti-Si-N; vacuum arc;

D O I：

10.1007/s11090-004-7929-3

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

The development of novel superhard nanocomposite, nano-layered coatings and of the coating technology based on vacuum arc evaporation from rotating electrodes is summarized. The nc-(Al1-xTix)Nla-Si3N4 coatings in which the nanocrystals of the Al-rich solid solution with the fcc crystal structure of TiN are imbedded into a thin matrix of amorphous silicon nitride show high thermal stability, oxidation resistance and excellent performance in dry, fast machining that is superior to the state-of-the-art (Ti1-xAlx)N coatings.

引用

页码：493 / 510

页数：18

共 34 条

[1] DEFECT STRUCTURE AND PHASE-TRANSITIONS IN EPITAXIAL METASTABLE CUBIC TI0.5AL0.5N ALLOYS GROWN ON MGO(001) BY ULTRA-HIGH-VACUUM MAGNETRON SPUTTER DEPOSITION [J].