Parallel frequency readout of an array of mass-sensitive transducers for sensor applications

Polymer coated cantilevers as mass-sensitive transducers for miniaturized gas sensors, an approach for which promising results have been demonstrated recently [1], have been developed and investigated further towards applications. A new detection arrangement has been realized, which enables a simultaneous frequency readout of several cantilevers. In addition, it was possible to coat the cantilevers with different polymers showing specific sensitivity to different gases. Finally, we present the first measurements on the simultaneous application and readout of differently coated cantilevers exposed to a mixture of gases.