Requirements of ultrathin carbon coatings for magnetic storage technology

被引：89

作者：

Robertson, J ^{[1
]}

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

来源：

TRIBOLOGY INTERNATIONAL | 2003年 / 36卷 / 4-6期

关键词：

D O I：

10.1016/S0301-679X(02)00216-5

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Diamond-like carbon (DLC) is presently used as protective coating on disks, heads and sliders used in magnetic disk storage technology. The rapidly increasing storage density will soon require carbon films of only 2 nm thickness. Carbon films are now made by sputtering, but it is unlikely that this method can provide the continuous 2 nm films needed in future. This paper describes methods to produce thinner films, such as filtered cathodic vacuum arc (FCVA) and plasma enhanced chemical vapour deposition (PECVD) methods. Various characterisation methods such as Raman and X-ray reflectivity are described and compared. (C) 2003 Elsevier Science Ltd. All rights reserved.

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页码：405 / 415

页数：11

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