Double-layer anti-reflection coating using MgF2 and CeO2 films on a crystalline silicon substrate

被引：69

作者：

Lee, SE ^{[1
]}

Choi, SW ^{[1
]}

Yi, J ^{[1
]}

机构：

[1] Sungkyunkwan Univ, Sch Elect & Comp Engn, Jangan Gu, Suwon 440746, Kyunggi Do, South Korea

来源：

THIN SOLID FILMS | 2000年 / 376卷 / 1-2期

关键词：

optical coatings; optical properties; reflection spectra; silicon;

D O I：

10.1016/S0040-6090(00)01205-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper describes an investigation of double-layer anti-reflection (DLAR) coatings with MgF2 and CeO2 films. We obtained CeO2 films with a refractive index between 2.3 and 2.4, a surface state density of approximately 10(11) eV(-l) cm(-2), and a similar lattice mismatch to silicon substrate. The CeO2 film grown at 400 degreesC exhibited a (111) preferred orientation and the lowest surface roughness of 6.87 Angstrom. The refractive index for the MgF2 film exhibited approximately 1.386 for most of the film growth temperatures. A theoretically optimized DLAR coating was found to have an average reflectance as low as 1.87% when wavelengths ranged from 0.4 mum to 1.1 mum. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：208 / 213

页数：6

共 16 条

[1] A NOVEL AND EFFECTIVE PECVD SIO2/SIN ANTIREFLECTION COATING FOR SI SOLAR-CELLS [J].

CHEN, ZZ ;

SANA, P ;

SALAMI, J ;

ROHATGI, A .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (06) :1161-1165

[2]

CHOPRA KL, 1983, THIN FILM SOLAR CELL, P520

[3]

CULLITY BD, 1978, ELEMENTS XRAY DIFFRA, P365

[4]

Goetzberger A., 1998, CRYSTALLINE SILICON, P89

[5] CHARACTERIZATION OF 23-PERCENT EFFICIENT SILICON SOLAR-CELLS [J].

GREEN, MA ;

BLAKERS, AW ;

ZHAO, JH ;

MILNE, AM ;

WANG, AH ;

DAI, XM .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1990, 37 (02) :331-336

[6]

HUANG D, 1995, APPL PHYS LETT, V67, P18

[7] INTERMEDIATE AMORPHOUS LAYER FORMATION MECHANISM AT THE INTERFACE OF EPITAXIAL CEO2 LAYERS AND SI SUBSTRATES [J].

INOUE, T ;

OHSUNA, T ;

OBARA, Y ;

YAMAMOTO, Y ;

SATOH, M ;

SAKURAI, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (04) :1765-1767

[8]

INOUE T, 1990, APPL PHYS LETT, V56, P2

[9]

MA Green, 1982, SOLAR CELLS OPERATIN, P164

[10] ELECTRICAL CHARACTERISTICS OF METAL CERIUM DIOXIDE SILICON STRUCTURES [J].

NAKAZAWA, T ;

INOUE, T ;

SATOH, M ;

YAMAMOTO, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (2A) :548-553

← 1 2 →