共 25 条
[1]
[Anonymous], 1998, PROPERTIES AMORPHOUS
[2]
EPITAXIAL-GROWTH OF TRANSITION-METAL SILICIDES ON SILICON
[J].
MATERIALS SCIENCE REPORTS,
1991, 6 (2-3)
:53-140
[6]
Gignac LM, 1997, MATER RES SOC SYMP P, V441, P255
[7]
Growth processes and electrical characteristics of silicon nitride films formed on Si(100) by radical nitrogen
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS,
2002, 41 (4B)
:2463-2467
[8]
IONUE K, 1995, INT EL DEV M, P445