The controlled pattern growth of aligned carbon nanotubes

被引:6
作者
Li, SH [1 ]
Liu, H [1 ]
Li, HF [1 ]
Zhai, J [1 ]
Jiang, L [1 ]
Zhu, DB [1 ]
机构
[1] Chinese Acad Sci, Inst Chem, Ctr Mol Sci, Beijing 100080, Peoples R China
关键词
graphite and related compounds; manipulation of surface structure and morphology;
D O I
10.1016/S0379-6779(02)00908-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Micropatterns of aligned carbon nanotubes (CNTs) have been prepared by chemical vapor deposition (CVD) method, and patterned structure of aligned CNTs was controlled through patterned formation of silicon oxide (SiO2) using lithographic technology. The simultaneous growth of carbon nanotubes in different directions could be realized. The building of nanotube-based micro-pattern is useful for fabricating electrical devices.
引用
收藏
页码:815 / 816
页数:2
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