Athermal arrayed-waveguide grating multi/demultiplexers composed of TiO2-SiO2 waveguides on Si

被引：25

作者：

Hirota, H ^{[1
]}

Itoh, M ^{[1
]}

Oguma, M ^{[1
]}

Hibino, Y ^{[1
]}

机构：

[1] NTT Corp, Photon Labs, Atsugi, Kanagawa 2430198, Japan

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2005年 / 17卷 / 02期

关键词：

optical planar waveguides; optical waveguides; wavelength-division multiplexing;

D O I：

10.1109/LPT.2004.839449

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have successfully demonstrated a novel athermal arrayed-waveguide grating (AWG), which is composed of highly TiO2-doped SiO2 glass rib waveguides on a silicon substrate. We found that the wavelength temperature coefficients of the athermal AWG depend not only on the TiO2 concentration but also on the annealing temperature after fabrication. We obtained a center wavelength temperature coefficient of 0.7 pm/degreesC at a TiO2 concentration of 66 mol% and an annealing temperature of 900 degreesC.

引用

页码：375 / 377

页数：3

共 9 条

[1]

ACKERMAN KA, 2003, TECH DIG OFC, V2, P130

[2] Mixed films of TiO2-SiO2 deposited by double electron-beam coevaporation [J].

Chen, JS ;

Chao, S ;

Kao, JS ;

Niu, H ;

Chen, CH .

APPLIED OPTICS, 1996, 35 (01) :90-96

[3]

Heise G, 1998, 24TH EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION, VOL 1-3, P319, DOI 10.1109/ECOC.1998.732565

[4]

HIROTA H, UNPUB JPN J APPL PHY

[5] Athermal silica-based arrayed-waveguide grating multiplexer [J].

Inoue, Y ;

Kaneko, A ;

Hanawa, F ;

Takahashi, H ;

Hattori, K ;

Sumida, S .

ELECTRONICS LETTERS, 1997, 33 (23) :1945-1947

[6] 3-DIMENSIONAL ATHERMAL WAVE-GUIDES FOR TEMPERATURE INDEPENDENT LIGHTWAVE DEVICES [J].

KOKUBUN, Y ;

TAKIZAWA, M ;

TAGA, S .

ELECTRONICS LETTERS, 1994, 30 (15) :1223-1224

[7]

MARU K, 2000, TECH DIG OFC, V2, P130

[8] Athermal silica-based arrayed-waveguide grating multiplexer using bimetal plate temperature compensator [J].

Ooba, N ;

Hibino, Y ;

Inoue, Y ;

Sugita, A .

ELECTRONICS LETTERS, 2000, 36 (21) :1800-1801

[9] WAVELENGTH MULTIPLEXER BASED ON SIO2-TA2O5 ARRAYED-WAVE-GUIDE GRATING [J].

TAKAHASHI, H ;

SUZUKI, S ;

NISHI, I .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1994, 12 (06) :989-995

← 1 →