Mixed films of TiO2-SiO2 deposited by double electron-beam coevaporation

被引:82
作者
Chen, JS
Chao, S
Kao, JS
Niu, H
Chen, CH
机构
[1] NATL SCI COUNCIL,PRECIS INSTRUMENT DEV CTR,HSINCHU,TAIWAN
[2] NATL TSING HUA UNIV,NUCL SCI & TECHNOL DEV CTR,HSINCHU,TAIWAN
[3] IND TECHNOL RES INST,ENERGY LAB,HSINCHU,TAIWAN
[4] IND TECHNOL RES INST,RESOURCES LAB,HSINCHU,TAIWAN
来源
APPLIED OPTICS | 1996年 / 35卷 / 01期
关键词
optical thin film; optical mixed film; electron-beam coevaporation;
D O I
10.1364/AO.35.000090
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We used double electron-beam coevaporation to fabricate TiO2-SiO2 mixed films. The deposition process included oxygen partial pressure, substrate temperature, and deposition rate, all of which were real-time computer controlled. The optical properties of the mixed films varied from pure SiO2 to pure TiO2 as the composition of the films varied accordingly. X-ray diffraction showed that the mixed films all have amorphous structure with a SiO2 content of as low as 11%. Atomic force microscopy showed that the mixed film has a smoother surface than pure TiO2 film because of its amorphous structure. Linear and Bruggeman's effective medium approximation models fit the experimental data better than other models.
引用
收藏
页码:90 / 96
页数:7
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