RUGATE FILTERS BY LASER FLASH EVAPORATION OF SIOXNY ON ROOM-TEMPERATURE POLYCARBONATE

被引：12

作者：

BARTHOLOMEW, CS

MORROW, MD

BETZ, HT

GRIESER, JL

SPENCE, RA

MURARKA, NP

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575316

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1703 / 1707

页数：5

共 9 条

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[6] VACUUM DEPOSITION OF DIELECTRIC AND SEMICONDUCTOR FILMS BY A CO2 LASER [J].

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[8]

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[9]

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