共 21 条
[2]
An integrated gas sensor technology using surface micro-machining
[J].
14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST,
2001,
:543-546
[3]
COMINI E, 1908, SENSOR ACTUAT B-CHEM, V76, P270
[6]
Fort A, 2000, IEEE IMTC P, P1458, DOI 10.1109/IMTC.2000.848716
[8]
HINES EL, 1999, I ELEC ENG P CIRCUIT, V146