Characterization of direct patterned Ag circuits for RF application

被引：22

作者：

Kim, Jong-Woong ^{[1
]}

Lee, Young-Chul ^{[1
]}

Kim, Jong-Min ^{[2
]}

Nah, Wansoo ^{[2
]}

Lee, Hyo-Soo ^{[3
]}

Kwon, Hyuk-Chon ^{[3
]}

Jung, Seung-Boo ^{[1
]}

机构：

[1] Sungkyunkwan Univ, Sch Adv Mat Sci & Engn, Suwon 440746, South Korea

[2] Sungkyunkwan Univ, Sch Elect & Comp Engn, Suwon 440746, South Korea

[3] Korea Inst Ind Technol, Adv Mat Dev Ctr, Inchon 406840, South Korea

来源：

MICROELECTRONIC ENGINEERING | 2010年 / 87卷 / 03期

关键词：

Radio frequency; Screen printing; Conductive nano-paste; Sintering temperature; LINES;

D O I：

10.1016/j.mee.2009.06.012

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We investigated the effects of sintering temperature on microstructural evolution and electrical characteristics of screen printed Ag patterns. A commercial conducting paste containing Ag nanoparticles was screen printed onto a Si substrate passivated with SiO2 and sintered under a sintering temperature range from 150 degrees C to 300 degrees C. Four point probe method was used to measure the DC resistance, while a network analyzer and Cascade's probe system in the frequency range from 10 MHz to 30 GHz were employed to measure the S-parameters of the sintered Ag conducting patterns. The resistivity under the application of a DC decreased from 398 mu Omega cm to 9 mu Omega cm with increasing sintering temperature from 150 degrees C to 300 degrees C. From the measured S-parameters, the electrical losses in high frequencies also decreased with increasing sintering temperature (about 1.2 dB at 30 GHz) due to the formation of an interparticle neck after heat treatment at high temperatures. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：379 / 382

页数：4

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