High-density bump formation on a glass surface using femtosecond laser processing in water

被引：8

作者：

Hayasaki, Y. ^{[1
]}

Kawamura, D. ^{[1
]}

机构：

[1] Univ Tokushima, Fac Engn, Dept Opt Sci & Technol, Tokushima 7708506, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2007年 / 87卷 / 04期

关键词：

D O I：

10.1007/s00339-007-3930-z

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Micrometer-sized bumps were formed on a glass surface using a focused femtosecond laser processing in water. The bumps were formed over a wide ranges of pulse irradiation parameters, including irradiation energy and focus position. The bumps exhibited a wide variety of morphologies and sizes depending on the parameters. The use of a liquid, namely heavy water, which returns after breakdown and cavitation bubble formation, enabled us to fabricate bumps with high spatial density, which is not possible using a solid coating that is ablated. A desired arrangement of bumps on a glass surface was fabricated by tuning the processing time interval to be more than the disappearance time of a bubble, generated by focusing a femtosecond laser pulse near the water/glass interface.

引用

页码：691 / 695

页数：5

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