Towards nanostructuring with femtosecond laser pulses

被引：244

作者：

Korte, F ^{[1
]}

Serbin, J ^{[1
]}

Koch, J ^{[1
]}

Egbert, A ^{[1
]}

Fallnich, C ^{[1
]}

Ostendorf, A ^{[1
]}

Chichkov, BN ^{[1
]}

机构：

[1] Laser Zentrum Hannover eV, D-30419 Hannover, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 77卷 / 02期

关键词：

D O I：

10.1007/s00339-003-2110-z

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Detailed investigations of the possibilities for using femtosecond lasers for the nanostructuring of metal layers and transparent materials are reported. The aim is to develop a simple laser-based technology for fabricating two- and three-dimensional nanostructures with structure sizes on the order of several hundred nanometers. This is required for many applications in photonics, for the fabrication of photonic crystals and microoptical devices, for data storage, displays, etc. Measurements of thermionic electron emission from metal targets, which provide valuable information on the dynamics of femtosecond laser ablation, are discussed. Sub-wavelength microstructuring of metals is performed and the minimum structure size that can be fabricated in transparent materials is identified. Two-photon polymerization of hybrid polymers is demonstrated as a promising femtosecond laser-based nanofabrication technology.

引用

页码：229 / 235

页数：7

共 18 条

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