Bismuth Hall probes: Preparation, properties and application

被引：14

作者：

Koseva, R. ^{[1
]}

Moench, I. ^{[1
]}

Schumann, J. ^{[1
]}

Arndt, K. -F. ^{[2
]}

Schmidt, O. G. ^{[1
]}

机构：

[1] IFW Dresden, Inst Integrat Nanosci, D-01069 Dresden, Germany

[2] Tech Univ Dresden, Dept Chem, D-01062 Dresden, Germany

来源：

THIN SOLID FILMS | 2010年 / 518卷 / 17期

关键词：

Bismuth; Hall probes; Structural properties; Electrical properties and measurements; Hydrogels; Swell sensor; ELECTRON-BEAM LITHOGRAPHY; POLYCRYSTALLINE SILICON; FILMS; MOBILITY;

D O I：

10.1016/j.tsf.2010.02.010

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Bismuth Hall probes with an active area in the mu m(2) and sub-mu m(2) (down to (100 x 100) nm(2)) range have been fabricated on SiO(2)/Si substrates. The structural and electrical properties of Bi films with a thickness of 20-90 nm were investigated. Critical values of the structural characteristics, at which the film resistivity dependences undergo a distinct change were found. The transition to low resistivity, good crystallinity and high degree of texturing were observed at a film thickness of 65 nm. The potential use of the Bi Hall sensor as a swell sensor for monitoring the swelling of stimuli-sensitive hydrogels was demonstrated. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：4847 / 4851

页数：5

共 18 条

[1]

[Anonymous], XRAY DIFFRACTION PRO

[2]

Arndt K.F., 2009, HYDROGELS BIOL PROPE

[3] Structure-function relationship between preferred orientation of crystallites and electrical resistivity in thin polycrystalline ZnO:Al films -: art. no. 205414 [J].

Birkholz, M ;

Selle, B ;

Fenske, F ;

Fuhs, W .

PHYSICAL REVIEW B, 2003, 68 (20)

[4] Patterning of thin Poly(N-viny1 pyrrolidone) films on silicon substrates by electron beam lithography [J].

Burkert, Sina ;

Schmidt, Thomas ;

Gohs, Uwe ;

Moench, Ingolf ;

Arndt, Karl-Friedrich .

JOURNAL OF APPLIED POLYMER SCIENCE, 2007, 106 (01) :534-539

[5] Thickness dependence of electrical and optical properties of sputtered nickel oxide films [J].

Chen, HL ;

Lu, YM ;

Hwang, WS .

THIN SOLID FILMS, 2006, 498 (1-2) :266-270

[6]

CHOUDHURY PR, 1973, J ELECTROCHEM SOC, V120, P1761

[7]

Derossi D., 1991, Polymer gels: Fundamentals and biomedical applications

[8]

GERLACH G, 2004, SENSOR ACTUAT B-CHEM, V555, P111

[9]

*ICSD, 64705 ICSD FACH KARL

[10] HALL MOBILITY IN CHEMICALLY DEPOSITED POLYCRYSTALLINE SILICON [J].

KAMINS, TI .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (11) :4357-&

← 1 2 →