Growth characteristics of carbon nanotubes using platinum catalyst by plasma enhanced chemical vapor deposition

被引:25
作者
Han, JH
Choi, SH
Lee, TY
Yoo, JB
Park, CY
Jung, T
Yu, SG
Yi, W
Han, IT
Kim, JM
机构
[1] Sungkyunkwan Univ, Ctr Nanotubes & Nanostruct Composit, Jangan Gu, Suwon 440746, South Korea
[2] Samsung Adv Inst Technol, NCRI, Ctr Elect Emiss Source, Suwon 440600, South Korea
[3] Hanyang Univ, Dept Chem, Seongdong Gu, Seoul 133791, South Korea
关键词
carbon nanotubes; platinum; NH3 plasma pre-treatment; plasma enhanced chemical vapor deposition;
D O I
10.1016/S0925-9635(03)00029-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In growth of carbon nanotubes (CNTs) using Pt catalyst by plasma enhanced chemical vapor deposition, effects of experimental parameters, such as NH3 plasma pre-treatment, NH3/C2H2 ratio and growth temperature, on the growth characteristics of CNTs were studied in details. It is noteworthy that fine dispersion of numerous nano-sized Pt particles was supported on the wall of a CNT without agglomeration. Application of CNTs with nano-sized Pt particles to the electrodes of the fuel cell can be possible. (C) 2063 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:878 / 883
页数:6
相关论文
共 14 条
[11]  
LEE TY, 2003, DIAMOND RELAT MAT, V12
[12]   LARGE-SCALE SYNTHESIS OF SINGLE-SHELL CARBON NANOTUBES [J].
LIN, X ;
WANG, XK ;
DRAVID, VP ;
CHANG, RPH ;
KETTERSON, JB .
APPLIED PHYSICS LETTERS, 1994, 64 (02) :181-183
[13]   Single- and multi-wall carbon nanotube field-effect transistors [J].
Martel, R ;
Schmidt, T ;
Shea, HR ;
Hertel, T ;
Avouris, P .
APPLIED PHYSICS LETTERS, 1998, 73 (17) :2447-2449
[14]  
OHRING M, 1992, MAT SCI THIN FILMS, P198