Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching

被引:154
作者
Ruan, YL
Li, WT
Jarvis, R
Madsen, N
Rode, A
Luther-Davies, B
机构
[1] Australian Natl Univ, Ctr Ultra High Bandwidth Devices Opt Syst, Canberra, ACT 0200, Australia
[2] Australian Natl Univ, Australian Photon Cooperat Res Ctr, Laser Phys Ctr, Canberra, ACT 0200, Australia
来源
OPTICS EXPRESS | 2004年 / 12卷 / 21期
关键词
D O I
10.1364/OPEX.12.005140
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We report the fabrication and characterization of rib chalcogenide waveguides produced by dry etching with CF4 and O-2. The high index contrast waveguides (Deltan similar to 1) show a minimum propagation loss of 0.25 dB/cm. The high refractive nonlinearity of similar to 100 times silica in As2S3 allowed observation of a pi phase shift due to self-phase modulation of an 8 ps duration 1573 nm pulse in a 5 cm long waveguide. (C) 2004 Optical Society of America.
引用
收藏
页码:5140 / 5145
页数:6
相关论文
共 15 条
[1]  
Agrawal G., 2001, Nonlinear Fibers Optics, V3rd
[2]   3RD-ORDER NONLINEAR SPECTROSCOPY IN AS2S3 CHALCOGENIDE GLASS-FIBERS [J].
ASOBE, M ;
KANAMORI, T ;
NAGANUMA, K ;
ITOH, H ;
KAINO, T .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (11) :5518-5523
[3]   Non-linear optical properties of chalcogenide glasses in the system As-S-Se [J].
Cardinal, T ;
Richardson, KA ;
Shim, H ;
Schulte, A ;
Beatty, R ;
Le Foulgoc, K ;
Meneghini, C ;
Viens, JF ;
Villeneuve, A .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1999, 256 :353-360
[4]  
GOPINATH JT, 2004, P 2004 C LAS EL OPT, pCFA3
[5]   Deposition and characterization of germanium sulphide glass planar waveguides [J].
Huang, CC ;
Hewak, DW ;
Badding, JV .
OPTICS EXPRESS, 2004, 12 (11) :2501-2506
[6]   High Verdet constant Ga:S:La:O chalcogenide glasses for magneto-optical devices [J].
Pedroso, CB ;
Munin, E ;
Villaverde, AB ;
Neto, JAM ;
Aranha, N ;
Barbosa, LC .
OPTICAL ENGINEERING, 1999, 38 (02) :214-219
[7]   THE APPLICATION OF THE HELICON SOURCE TO PLASMA PROCESSING [J].
PERRY, AJ ;
VENDER, D ;
BOSWELL, RW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :310-317
[8]   Excitation of Er3+ emission by host glass absorption in sputtered films of Er-doped Ge10As40Se25S25 glass [J].
Ramachandran, S ;
Bishop, SG .
APPLIED PHYSICS LETTERS, 1998, 73 (22) :3196-3198
[9]   Laser-deposited As2S3 chalcogenide films for waveguide applications [J].
Rode, AV ;
Zakery, A ;
Samoc, M ;
Charters, RB ;
Gamaly, EG ;
Luther-Davies, B .
APPLIED SURFACE SCIENCE, 2002, 197 :481-485
[10]  
Ruan Y., 2003, Acta Optica Sinica, V23, P363