An environmental sensor based on an integrated optical whispering gallery mode disk resonator

被引：66

作者：

Schweinsberg, Aaron ^{[1
]}

Hocde, Sandrine

Lepeshkin, Nick N.

Boyd, Robert W.

Chase, Christopher

Fajardo, Julie E.

机构：

[1] Univ Rochester, Inst Opt, Rochester, NY 14627 USA

[2] Agave BioSyst, Ithaca, NY 14850 USA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2007年 / 123卷 / 02期

基金：

美国国家航空航天局; 美国国家科学基金会;

关键词：

evanescent-wave sensors; whispering gallery mode resonators; integrated optics; silicon oxy-nitride; label-free sensing;

D O I：

10.1016/j.snb.2006.10.007

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this report, we describe the fabrication and testing of an integrated optical whispering gallery mode resonator designed for use as an evanescent field environmental sensor. We use traditional photolithographic techniques to create 500 mu m radius disk resonators in silicon oxy-nitride. The devices are overclad with a thin film of SiO2 to provide a suitable surface for subsequent chemical adhesion of organic compounds and protein layers. Tests performed with sucrose solutions indicate a sensitivity to surface index variations of An similar to 1.0 x 10(-5) refractive index units (RIU). We also demonstrate the ability of these devices to monitor protein layers binding to the surface. (C) 2006 Elsevier B.V. All rights reserved.

引用

页码：727 / 732

页数：6