MEMS-based high speed scanning probe microscopy

被引：23

作者：

Disseldorp, E. C. M. ^{[1
]}

Tabak, F. C. ^{[1
]}

Katan, A. J. ^{[1
]}

Hesselberth, M. B. S. ^{[1
]}

Oosterkamp, T. H. ^{[1
]}

Frenken, J. W. M. ^{[1
]}

van Spengen, W. M. ^{[1
,2
]}

机构：

[1] Leiden Univ, NL-2333 CA Leiden, Netherlands

[2] Falco Syst, NL-1082 LV Amsterdam, Netherlands

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2010年 / 81卷 / 04期

关键词：

atomic force microscopy; micromechanical devices; scanning tunnelling microscopy; BEAM-INDUCED DEPOSITION; INTEGRATED TIP; DESIGN;

D O I：

10.1063/1.3361215

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The high speed performance of a scanning probe microscope (SPM) is improved if a microelectromechanical systems (MEMS) device is employed for the out-of-plane scanning motion. We have carried out experiments with MEMS high-speed z-scanners (189 kHz fundamental resonance frequency) in both atomic force microscope and scanning tunneling microscope modes. The experiments show that with the current MEMS z-scanner, lateral tip speeds of 5 mm/s can be achieved with full feedback on surfaces with significant roughness. The improvement in scan speed, obtained with MEMS scanners, increases the possibilities for SPM observations of dynamic processes. Even higher speed MEMS scanners with fundamental resonance frequencies in excess of a megahertz are currently under development.

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页数：7

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