High-pressure process to produce GaN crystals

被引:7
作者
Gilbert, DR
Novikov, A
Patrin, N
Budai, JD
Kelly, F
Chodelka, R
Abbaschian, R
Pearton, SJ
Singh, R [1 ]
机构
[1] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[2] Gemesis Corp, Gainesville, FL 34228 USA
[3] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA
关键词
D O I
10.1063/1.1330754
中图分类号
O59 [应用物理学];
学科分类号
摘要
High melt temperature and thermal decomposition prevent the use of standard bulk semiconductor crystal growth processes for the production of GaN. We have employed a hydrostatic pressure system to grow GaN crystals. An ultrahigh pressure, high temperature process was developed using a solid-phase nitrogen source to form GaN crystals in a Ga metal melt. Using a thermal gradient diffusion process, in which nitrogen dissolves in the high temperature region of the metal melt and diffuses to the lower temperature, lower solubility region, high quality crystals up to similar to1 mm in size were formed, as determined by scanning electron microscopy, x-ray diffraction, and micro-Raman analysis. (C) 2000 American Institute of Physics. [S0003- 6951(00)00650-1].
引用
收藏
页码:4172 / 4174
页数:3
相关论文
共 12 条
[1]  
Grzegory I, 1996, MRS INTERNET J N S R, V1, pU155
[2]   CRYSTAL-GROWTH OF III-N COMPOUNDS UNDER HIGH-NITROGEN PRESSURE [J].
GRZEGORY, I ;
JUN, J ;
KRUKOWSKI, S ;
BOCKOWSKI, M ;
POROWSKI, S .
PHYSICA B, 1993, 185 (1-4) :99-102
[3]  
Melnik YV, 1997, MRS INTERNET J N S R, V2
[4]   High pressure growth of GaN - New prospects for blue lasers [J].
Porowski, S .
JOURNAL OF CRYSTAL GROWTH, 1996, 166 (1-4) :583-589
[5]  
Porowski S, 1999, MRS INTERNET J N S R, V4
[6]   Thermodynamical properties of III-V nitrides and crystal growth of GaN at high N-2 pressure [J].
Porowski, S ;
Grzegory, I .
JOURNAL OF CRYSTAL GROWTH, 1997, 178 (1-2) :174-188
[7]  
Porowski S., 1994, I PHYS C SER, V137, P369
[8]  
POROWSKI SI, 1994, PROPERTIES GROUP 3 N, P80
[9]   Hydride vapor-phase epitaxy growth of high-quality GaN bulk single crystal by epitaxial lateral overgrowth [J].
Shibata, T ;
Sone, H ;
Yahashi, K ;
Yamaguchi, M ;
Hiramatsu, K ;
Sawaki, N ;
Itoh, N .
JOURNAL OF CRYSTAL GROWTH, 1998, 189 :67-71
[10]   Thick GaN epitaxial growth with low dislocation density by hydride vapor phase epitaxy [J].
Usui, A ;
Sunakawa, H ;
Sakai, A ;
Yamaguchi, AA .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1997, 36 (7B) :L899-L902