Surface hydroxyl content controls the thermolysis stoichiometry of a surface bound organometallic complex

被引：27

作者：

Lu, G ^{[1
]}

Purvis, KL ^{[1
]}

Schwartz, J ^{[1
]}

Bernasek, S ^{[1
]}

机构：

[1] PRINCETON UNIV,DEPT CHEM,PRINCETON,NJ 08544

来源：

LANGMUIR | 1997年 / 13卷 / 22期

关键词：

D O I：

10.1021/la9709507

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The thermal decomposition profile for the product of organometallic chemical vapor deposition (OMCVD) of tetra(tert-butoxy)zirconium on an oxide-modified aluminum surface depends on the initial surface hydroxyl group coverage. Controlled thermolysis of the tri(tert-butoxy)zirconium species bound to the low hydroxyl group content surface shows nearly complete degradation to ZrO2 at T > 350 K. In contrast, thermolysis of the tri(tert-butoxy)zirconium species bound to the hydroxyl group-saturated surface gives a thermally more stable (to >450 K) di(tert-butoxy)zirconium surface complex. Deposition and thermal evolution reactions were followed by both reflection-absorption infrared and X-ray photoelectron spectroscopies.

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收藏

页码：5791 / 5793

页数：3

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