Standard sample probes for characterizing optical apertures in near-field scanning optical microscopy

被引:4
作者
Imhof, JM [1 ]
Kwak, ES [1 ]
Vanden Bout, DA [1 ]
机构
[1] Univ Texas, Texas Mat Inst, Ctr Nano & Mol Sci & Technol, Dept Chem & Biochem, Austin, TX 78712 USA
关键词
D O I
10.1063/1.1556951
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A quick, cost effective, semiquantitative means for gauging the quality of near-field scanning optical microscopy (NSOM) probe apertures has been demonstrated by employing a nanoperforated thin metal film standard sample. Small 182 nm holes were created by evaporating gold over dispersed latex spheres with subsequent removal of the spheres. The size of the NSOM aperture can be determined from a deconvolution of the image size and the known sample size and geometry. Results from the standard correlate well with aperture size measurements made from scanning electron micrographs. (C) 2003 American Institute of Physics.
引用
收藏
页码:2424 / 2428
页数:5
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