Characteristics of perovskite (Li0.5La0.5)TiO3 solid electrolyte thin films grown by pulsed laser deposition for rechargeable lithium microbattery

被引：44

作者：

Ahn, JK ^{[1
]}

Yoon, SG ^{[1
]}

机构：

[1] Chungnam Natl Univ, Dept Mat Engn, Taejon 305764, South Korea

来源：

ELECTROCHIMICA ACTA | 2004年 / 50卷 / 2-3期

关键词：

(Li; La)TiO3; solid electrolyte; pulsed laser deposition; lithium battery; ionic conductivity;

D O I：

10.1016/j.electacta.2004.02.065

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

(Li0.5La0.5)TiO3 (LLTO) film electrolytes for lithium rechargeable microbattery were prepared onto Pt/TiO2/SiO2/Si substrates using pulsed laser deposition (PLD) at deposition temperature of 500degreesC. A 400 nm thick-LLTO films as-deposited at 500degreesC and annealed up to 600degreesC showed an amorphous-like phase and surface roughness of the films was independent of an annealing temperature. The ionic conductivity of as-deposited films was approximately 1.1 X 10(-5) S cm(-1) at room temperature and it slightly decreased with increasing annealing temperature. The LLTO films deposited by PLD are suitable for application as an electrolyte of thin-film microbattery. (C) 2004 Elsevier Ltd. All rights reserved.

引用

页码：371 / 374

页数：4

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