Probe-Based Nanolithography: Self-Amplified Depolymerization Media for Dry Lithography

被引：80

作者：

Coulembier, Olivier ^{[2
]}

Knoll, Armin ^{[1
]}

Pires, David ^{[1
]}

Gotsmann, Bernd ^{[1
]}

Duerig, Urs ^{[1
]}

Frommer, Jane ^{[3
]}

Miller, Robert D. ^{[3
]}

Dubois, Philippe ^{[2
]}

Hedrick, James L. ^{[3
]}

机构：

[1] IBM Corp, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland

[2] Univ Mons, CIRMAP, Lab Polymer & Composite Mat, B-7000 Mons, Belgium

[3] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA

来源：

MACROMOLECULES | 2010年 / 43卷 / 01期

关键词：

CHEMICAL AMPLIFICATION; AROMATIC ALDEHYDES; DATA-STORAGE; RESIST; POLYMERIZATION; CYCLOPOLYMERIZATION; PHTHALALDEHYDE; SENSITIVITY; MICROSCOPE; SYSTEMS;

D O I：

10.1021/ma9019152

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

A low temperature, organocatalytic method was developed to create polyphthalaldehydes of predictable molecular weights and narrow polydispersities. The polymerization were quenched with trichloroacetyl isocyanate (TCAI), known to react rapidly and quantitatively with hydroxyl chain ends preventing depolymerization as the reaction returns to room temperature. It was found that the lithographic patterning as demonstrated in a debris-free polymer decomposition reaction was triggered by the proximity of a heated probe. The results show that the process has been exploited to pattern large areas of a polymeric film with high throughput and resolution, demonstrating a first step to a low-cost, tabletop, and nanoscale patterning method.

引用

页码：572 / 574

页数：3

共 30 条

[1] POLYMERIZATION OF MALEALDEHYDE [J].