Terabit-per-square-inch data storage with the atomic force microscope

被引:144
作者
Cooper, EB
Manalis, SR [1 ]
Fang, H
Dai, H
Matsumoto, K
Minne, SC
Hunt, T
Quate, CF
机构
[1] MIT, Media Lab, Cambridge, MA 02139 USA
[2] Stanford Univ, Dept Chem, Stanford, CA 94305 USA
[3] Electrotech Lab, Tsukuba, Ibaraki 305, Japan
[4] Stanford Univ, Edward L Ginzton Lab, Stanford, CA 94305 USA
关键词
D O I
10.1063/1.125390
中图分类号
O59 [应用物理学];
学科分类号
摘要
An areal density of 1.6 Tbits/in.(2) has been achieved by anodically oxidizing titanium with the atomic force microscope (AFM). This density was made possible by (1) single-wall carbon nanotubes selectively grown on an AFM cantilever, (2) atomically flat titanium surfaces on alpha-Al2O3 (1012), and (3) atomic scale force and position control with the tapping-mode AFM. By combining these elements, 8 nm bits on 20 nm pitch are written at a rate of 5 kbit/s at room temperature in air. (C) 1999 American Institute of Physics. [S0003-6951(99)02248-2].
引用
收藏
页码:3566 / 3568
页数:3
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