Microplastic lens array fabricated by a hot intrusion process

被引:40
作者
Pan, LW [1 ]
Shen, XJ
Lin, LW
机构
[1] Perkin Elmer Corp, Santa Clara, CA 95054 USA
[2] Univ Calif Berkeley, Berkeley, CA 94720 USA
基金
美国国家科学基金会;
关键词
contactless; microintrustion; microlens; lens;
D O I
10.1109/JMEMS.2004.838363
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A microplastic lens array has been successfully constructed on top of a 500-mum-thick PC (Polycarbonate film) by using a micro hot intrusion process. A single-layer LIGA process is used to fabricate the high-aspect-ratio nickel mold insert that has circular hole patterns of 80 mum in diameter and 200 mum in depth. Under the hot intrusion process, plastic material can be intruded into these circular-shape holes and stopped at desired depth under elevated temperature and pressure to fabricate microlenses. By adjusting the embossing load, temperature and time, the curvature and height of the lens are controllable when the same mold insert is used. The optical properties of these microlenses have been characterized and the average radius of curvature is found as 41.4 mum with a standard deviation of 1.05 mum. Experimental characterization and theoretical model are conducted and developed for the micro-intrusion process in terms of the radius of curvature and height of the lenses and they correspond well with experimental data within 5% of variations. The focusing capability of the lenses is demonstrated by comparing the images of laser light with and without using the lenses. When the projection screen is placed 200 mum away from the lens, the full-width at half-maximum (FWHM) for the lens is 110 mum while the original FWHM of the optical fiber is 300 mum.
引用
收藏
页码:1063 / 1071
页数:9
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