LARGE-AMPLITUDE MEMS ELECTRET GENERATOR WITH NONLINEAR SPRING

被引：47

作者：

Miki, Daigo ^{[1
]}

Honzumi, Makoto ^{[1
]}

Suzuki, Yuji ^{[1
]}

Kasagi, Nobuhide ^{[1
]}

机构：

[1] Univ Tokyo, Dept Mech Engn, Tokyo 113, Japan

来源：

MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年

关键词：

D O I：

10.1109/MEMSYS.2010.5442536

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A MEMS electret generator with nonlinear spring has been developed for energy harvesting applications. By using hybrid high-aspect-ratio parylene springs, a large-amplitude oscillation over 1.0 mm(p-p) has been obtained in a broad frequency range of 46-73 Hz. By using our mechanical model of the nonlinear spring, we have confirmed that the model can mimic frequency response of the mass-spring system. With the aid of electrostatic levitation mechanisms for keeping the air gap, power output of 1.0 mu W has been obtained at 63 Hz.

引用

页码：176 / 179

页数：4

共 11 条

[1] Energy harvesting vibration sources for microsystems applications [J].

Beeby, S. P. ;

Tudor, M. J. ;

White, N. M. .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2006, 17 (12) :R175-R195

[2]

BORLAND J, 2003, P 16 IEEE INT C MEMS, P538

[3] LOW-RESONANT-FREQUENCY MICRO ELECTRET GENERATOR FOR ENERGY HARVESTING APPLICATION [J].

Edamoto, M. ;

Suzuki, Y. ;

Kasagi, N. ;

Kashiwagi, K. ;

Morizawa, Y. ;

Yokoyama, T. ;

Seki, T. ;

Oba, M. .

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 2009, :1059-1062

[4] Parylene-based electret power generators [J].

Lo, Hsi-wen ;

Tai, Yu-Chong .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (10)

[5]

Miki Daigo, 2009, 15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers 2009, P636, DOI 10.1109/SENSOR.2009.5285405

[6] Electrostatic micro power generation from low-frequency vibration such as human motion [J].

Naruse, Y. ;

Matsubara, N. ;

Mabuchi, K. ;

Izumi, M. ;

Suzuki, S. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (09)

[7] Energy scavenging for mobile and wireless electronics [J].

Paradiso, JA ;

Starner, T .

IEEE PERVASIVE COMPUTING, 2005, 4 (01) :18-27

[8] The development of a high-performance perfluorinated polymer electret and its application to micro power generation [J].

Sakane, Yoshihiko ;

Suzuki, Yuji ;

Kasagi, Nobuhide .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (10)

[9] Micromachined high-aspect-ratio parylene spring and its application to low-frequency accelerometers [J].

Suzuki, Yuji ;

Tai, Yu-Chong .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (05) :1364-1370

[10]

Tsurumi Y, 2008, PROC IEEE MICR ELECT, P511

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