Nonlinear vertical oscillations of a particle in a sheath of a rf discharge

被引：56

作者：

Ivlev, AV ^{[1
]}

Sütterlin, R ^{[1
]}

Steinberg, V ^{[1
]}

Zuzic, M ^{[1
]}

Morfill, G ^{[1
]}

机构：

[1] Max Planck Inst Extraterr Phys, D-85740 Garching, Germany

来源：

PHYSICAL REVIEW LETTERS | 2000年 / 85卷 / 19期

关键词：

D O I：

10.1103/PhysRevLett.85.4060

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A new simple method to measure the spatial distribution of the electric field in the plasma sheath is proposed. The method is based on the experimental investigation of vertical oscillations of a single particle in the sheath of a low-pressure radio-frequency discharge. It is shown that the oscillations become strongly nonlinear as the amplitude increases. The theory of anharmonic oscillations provides a good quantitative description of the data and gives estimates for the first two anharmonic terms in an expansion of the sheath potential around the particle equilibrium.

引用

页码：4060 / 4063

页数：4

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