Sheath dynamics observed in a 13.56 MHz-driven plasma

被引：58

作者：

Mahony, CMO ^{[1
]}

AlWazzan, R ^{[1
]}

Graham, WG ^{[1
]}

机构：

[1] ANDOR TECHNOL LTD,BELFAST,ANTRIM,NORTH IRELAND

来源：

APPLIED PHYSICS LETTERS | 1997年 / 71卷 / 05期

关键词：

D O I：

10.1063/1.119808

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have established, through time correlated plasma emission and electrode and plasma potential measurements, that the near electrode emission observed in asymmetric capacitively coupled 13.56 MHz-driven hydrogen plasmas is caused by field reversal that leads to sheath collapse. Near-electrode emission has now been observed in Ar and He. The field reversal appears to be due to collision-induced electron drag. (C) 1997 American Institute of Physics.

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收藏

页码：608 / 610

页数：3

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