ABSOLUTE SPATIALLY-RESOLVED AND TEMPORALLY-RESOLVED OPTICAL-EMISSION MEASUREMENTS OF RF GLOW-DISCHARGES IN ARGON

被引：27

作者：

DJUROVIC, S ^{[1
]}

ROBERTS, JR ^{[1
]}

SOBOLEWSKI, MA ^{[1
]}

OLTHOFF, JK ^{[1
]}

机构：

[1] INST PHYS, YU-21000 NOVI SAD, YUGOSLAVIA

来源：

JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | 1993年 / 98卷 / 02期

关键词：

ARGON; DISCHARGE; GASEOUS ELECTRONICS; OPTICAL EMISSION; PLASMA; RF; SPATIAL PROFILE; TEMPORAL DEPENDENCE;

D O I：

10.6028/jres.098.012

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Spatially- and temporally-resolved measurements of optical emission intensities are presented from rf discharges in argon over a wide range of pressures (6.7 to 133 Pa) and applied rf voltages (75 to 200 V). Results of measurements of emission intensities are presented for both an atomic transition (Ar I, 750.4 nm) and an ionic transition (Ar II, 434.8 nm). The absolute scale of these optical emissions has been determined by comparison with the optical emission from a calibrated standard lamp. All measurements were made in a well-defined rf reactor. They provide detailed characterization of local time-resolved plasma conditions suitable for the comparison with results from other experiments and theoretical models. These measurements represent a new level of detail in diagnostic measurements of rf plasmas, and provide insight into the electron transport properties of rf discharges.

引用

页码：159 / 180

页数：22

共 20 条

[1] STRUCTURE OF RF PARALLEL-PLATE DISCHARGES [J].