A CONTINUUM MODEL FOR LOW-PRESSURE RADIOFREQUENCY DISCHARGES

被引：23

作者：

MEYYAPPAN, M

机构：

[1] Scientific Research Associates, Inc., Glastonbury, CT 06033

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 69卷 / 12期

关键词：

D O I：

10.1063/1.347451

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A computational model for low-pressure (< 0.3-0.5 Torr) radio-frequency glow discharges is presented. The governing equations are the first three moments of the Boltzmann transport equations. In order to describe the weakly collisional sheaths, the nonlinear inertia terms in the momentum equations are retained. The model is demonstrated for a 13.56-MHz argon discharge. A parametric study involving variations in pressure, electrode spacing, and driving voltage is presented.

引用

页码：8047 / 8051

页数：5

共 19 条

[1] A STAGGERED-MESH FINITE-DIFFERENCE NUMERICAL-METHOD FOR SOLVING THE TRANSPORT-EQUATIONS IN LOW-PRESSURE RF GLOW-DISCHARGES [J].