共 16 条
[2]
CHAN SH, 2002, MEMS 2002, P136
[3]
Thin-film heterostructure solid oxide fuel cells
[J].
APPLIED PHYSICS LETTERS,
2004, 84 (14)
:2700-2702
[5]
Epstein AH, 1997, TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P753, DOI 10.1109/SENSOR.1997.635209
[6]
Hsieh SS, 2004, MICROSYST TECHNOL, V10, P121, DOI [10.1007/s00542-003-0321-z, 10.1007/S00542-003-0321-z]
[9]
LI ZP, 2002, POWER MEMS 2002, P86