Organoindium azides: new precursors to indium nitride

被引:45
作者
Fischer, RA
Sussek, H
Miehr, A
Pritzkow, H
Herdtweck, E
机构
[1] Univ Heidelberg, Inst Anorgan Chem, D-69120 Heidelberg, Germany
[2] Tech Univ Munchen Weihenstephan, Inst Anorgan Chem, D-85747 Garching, Germany
关键词
indium; azides; indium nitride; MOCVD; thin films;
D O I
10.1016/S0022-328X(97)00333-1
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
The synthesis, properties and the molecular structure in the solid state of triazido(tripyridino)indium (1), the mixed coordination polymer {(CF3SO3)In[(CH2)(3)NMe2)](2)(mu-N-3)In[(CH2)(3)NMe2)](2)}(x), (2) and the polymeric monoazide {(N-3)In[(CH2)(3)NMe2)](2)} (3) are reported. Some aspects of the precursor chemistry of 1-3 related to the synthesis of InN thin films are discussed, with special emphasis on the aspect of the accessible chemical purity of the precursors. Compound 3 al:owed the growth of crystalline InN thin films at 300-450 degrees C in the absence of ammonia using the technique of organometallic chemical vapor deposition. (C) 1997 Elsevier Science B.V.
引用
收藏
页码:73 / 82
页数:10
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