Structural characterization of vacuum evaporated ZnSe thin films

被引:136
作者
Kalita, PKR [1 ]
Sarma, BK [1 ]
Das, HL [1 ]
机构
[1] Gauhati Univ, Dept Phys, Guwahati 781014, India
关键词
ZnSe thin films; X-ray diffraction; average internal stress; microstrain; dislocation density;
D O I
10.1007/BF02720089
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thermally evaporated ZnSe thin films deposited on glass substrates within substrate temperatures (T-s) at 303 K-623 K are of polycrystalline nature having f.c.c. zincblende structure. The most preferential orientation is along [111] direction for all deposited films together with other abundant planes [220] and [311]. The lattice parameter, grain size, average internal stress, microstrain, dislocation density and degree of preferred orientation in the film are calculated and correlated with T-s.
引用
收藏
页码:313 / 317
页数:5
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