Compact 2D laser beam scanner with fan laser array and Si micromachined microscanner

被引:11
作者
Francis, DA
Kiang, MH
Solgaard, O
Lau, KY
Muller, RS
Chang-Hasnain, CJ
机构
[1] Univ Calif Berkeley, Berkeley, CA 94720 USA
[2] Univ Calif Davis, Dept Elect & Comp Engn, Davis, CA USA
关键词
semiconductor junction lasers; micromachining; semiconductor laser arrays; optoelectronic devices; integrated optics;
D O I
10.1049/el:19970769
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The first demonstration of a compact 2D laser beam scanning system using a beam steering fan diode laser array and an Si surface micromachined microscanner is reported. The system is capable of reading and writing operations that detect or generate arbitrary patterns with 7 x 10 pixel resolution. The system demonstrates the viability of these new technologies for applications such as laser scanners for remote sensing and barcode scanning, multi-beam laser printers, and multi-line write 2D laser displays.
引用
收藏
页码:1143 / 1145
页数:3
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