XPS investigation of BxNyCz coatings deposited by laser assisted chemical vapour deposition

Some of the most interesting new materials are located in the boron-carbon-nitrogen composition triangle. Laser assisted chemical vapour deposition (LCVD) using different gas phase precursors and processing conditions yields BxNyCz coatings with varying crystallographic structure and stoichiometry. In this work we investigate the capabilities of the X-ray photoelectron spectroscopy (XPS) technique for the characterisation of BxNyCz films produced by LCVD from diburane, ethane and ammonia or diborane and dimethylamine reactive atmospheres, using a continuous wave CO2 laser. The XPS results are interpreted together with those obtained by glancing incidence X-ray diffraction and electron microprobe analysis in order to study the chemical bonds present in the coatings. (C) 1998 Elsevier Science S.A.